NTT-AT’s X-ray resolution evaluation charts are applied to several X-ray analysis situations which require ultra-high resolution, such as X-ray microscopes, X-ray micro-beam analysis, and X-ray imaging. This de facto standard X-ray chart is used in a very large number of situations throughout the world.Its main features include high X-ray irradiation durability, ultra-sharp pattern and low edge roughness. Our SiC membrane based Ta absorber chart has proved to be outstandingly accurate and provides clear images for your X-ray analysis system evaluation.
Three types of X-ray chart are available for various applications: standard type, high resolution and high contrast type, and ultra-high resolution type. Customization of the pattern layout and substrate dimensions is available for your system.
|High resolution type
with thicker Ta
Ultra high resolution
|Substrate||Material / Size||Si 10mm square|
|Area||1mm square||1mm square||1mm square|
|Alignment||Center of the substrate||Center of the substrate||Center of the substrate|
|Ta 1µm||Ta 500nm||Ta 100nm|
|Patterned area||250µm × 350µm||300µm square||300µm square|
Schematic of X-ray chart (High resolution chart)