Description
NTT-AT’s X-ray resolution evaluation charts are applied to several X-ray analysis situations which require ultra-high resolution, such as X-ray microscopes, X-ray micro-beam analysis, and X-ray imaging. This de facto standard X-ray chart is used in a very large number of situations throughout the world.Its main features include high X-ray irradiation durability, ultra-sharp pattern and low edge roughness. Our SiC membrane based Ta absorber chart has proved to be outstandingly accurate and provides clear images for your X-ray analysis system evaluation.
Features
Three types of X-ray chart are available for various applications: standard type, high resolution and high contrast type, and ultra-high resolution type. Customization of the pattern layout and substrate dimensions is available for your system.
Parameter
| Item | Standard type XRESO-100 |
High resolution type with thicker Ta absorber XRESO-50HC |
NEW!! Ultra high resolution XRESO-20 |
|
| Substrate | Material / Size | Si 10mm square | ||
| Thickness | 1mm | 1mm | 0.625mm | |
| Membrane | Material / Thickness |
Ru 20nm SiN 2µm |
Ru 20nm SiC 200nm SiN 50nm |
Ru 20nm SiC 200nm SiN 50nm |
| Area | 1mm square | 1mm square | 1mm square | |
| Alignment | Center of the substrate | Center of the substrate | Center of the substrate | |
| Pattern | Absorber / Thickness |
Ta 1µm | Ta 500nm | Ta 100nm |
| Minimum pattern size |
100nm | 50nm | 20nm Radial Pattern |
|
| Patterned area | 250µm × 350µm | 300µm square | 300µm square | |
Schematic of X-ray chart (High resolution chart)
All Information given here is reliable to our best knowledge. No responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearances are subject to change without notice.
