X-ray Chart

X-ray Chart


NTT-AT’s X-ray resolution evaluation charts are applied to several X-ray analysis situations which require ultra-high resolution, such as X-ray microscopes, X-ray micro-beam analysis, and X-ray imaging.  This de facto standard X-ray chart is used in a very large number of situations throughout the world.Its main features include high X-ray irradiation durability, ultra-sharp pattern and low edge roughness. Our SiC membrane based Ta absorber chart has proved to be outstandingly accurate and provides clear images for your X-ray analysis system evaluation.


Three types of X-ray chart are available for various applications: standard type, high resolution and high contrast type, and ultra-high resolution type. Customization of the pattern layout and substrate dimensions is available for your system.


Item Standard type
High resolution type
with thicker Ta
Ultra high resolution
Substrate Material / Size Si 10mm square
Thickness 1mm 1mm 0.625mm
Membrane Material /
Ru 20nm
SiN 2µm
Ru 20nm
SiC 200nm
SiN 50nm
Ru 20nm
SiC 200nm
SiN 50nm
Area 1mm square 1mm square 1mm square
Alignment Center of the substrate Center of the substrate Center of the substrate
Pattern Absorber /
Ta 1µm Ta 500nm Ta 100nm
Minimum pattern
100nm 50nm 20nm
Radial Pattern
Patterned area 250µm × 350µm 300µm square 300µm square

Schematic of X-ray chart (High resolution chart)

All Information given here is reliable to our best knowledge. No responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearances are subject to change without notice.