Description
NTT-AT’s X-ray resolution evaluation charts are applied to several X-ray analysis situations which require ultra-high resolution, such as X-ray microscopes, X-ray micro-beam analysis, and X-ray imaging. This de facto standard X-ray chart is used in a very large number of situations throughout the world.Its main features include high X-ray irradiation durability, ultra-sharp pattern and low edge roughness. Our SiC membrane based Ta absorber chart has proved to be outstandingly accurate and provides clear images for your X-ray analysis system evaluation.
Features
Three types of X-ray chart are available for various applications: standard type, high resolution and high contrast type, and ultra-high resolution type. Customization of the pattern layout and substrate dimensions is available for your system.
Parameter
| Item | Standard type XRESO-100 |
High resolution type with thicker Ta absorber XRESO-50HC |
NEW!! Ultra high resolution XRESO-20 |
|
| Substrate | Material / Size | Si 10mm square | ||
| Thickness | 1mm | 1mm | 0.625mm | |
| Membrane | Material / Thickness |
Ru 20nm SiN 2µm |
Ru 20nm SiC 200nm SiN 50nm |
Ru 20nm SiC 200nm SiN 50nm |
| Area | 1mm square | 1mm square | 1mm square | |
| Alignment | Center of the substrate | Center of the substrate | Center of the substrate | |
| Pattern | Absorber / Thickness |
Ta 1µm | Ta 500nm | Ta 100nm |
| Minimum pattern size |
100nm | 50nm | 20nm Radial Pattern |
|
| Patterned area | 250µm × 350µm | 300µm square | 300µm square | |
Schematic of X-ray chart (High resolution chart)
