Description
NTT-AT provides the SiC membrane-based Fresnel Zone Plate (FZP), which has an outstandingly high X-ray irradiation durability. NTT-AT’s FZP is constructed from dry etched Ta. It has a sharp absorber pattern and achieves a high S/N ratio and low defect imaging. It is ideal for applications such as X-ray microscopes, X-ray micro-beam irradiation and X-ray imaging.
In addition, the Ta pattern/SiN membrane-type FZP and Au plated pattern/SiN membrane-type FZP are provided for using in soft X-ray and extreme ultraviolet (EUV/XUV) regions. Moreover, a Step (Kinoform) FZP is available.
Features
- Useful for various X-ray applications such as X-ray microscopes, EUV microscopes, X-ray microbeam irradiation, and synchrotron radiation beam monitors, etc.
- Outstandingly high X-ray irradiation durability
- Minimum zone width up to 25 nm
- Customized FZP also available
Parameter
| Model | Aspect Ratio |
Membrane Material |
Membrane Thickness (µm) |
ΔRn (nm) |
D (um) | N | Tm (nm) |
| FZP-S38/84 | 4.2 | SiN | 0.15 | 38 | 84 | 550 | 160 |
| FZP-S50/80 | 5 | SiN | 0.2 | 50 | 80 | 400 | 250 |
| FZP-S40/155 | 5 | SiN | 2 | 40 | 155 | 970 | 200 |
| FZP-S50/330 | 8 | SiN | 1 | 50 | 330 | 1,650 | 400 |
| FZP-S86/416 | 8 | SiN | 2 | 86 | 416 | 1,200 | 700 |
| FZP-100/155 | 8 | SiN | 2 | 100 | 155 | 388 | 800 |
| FZP-173/208 | 5.8 | SiN | 2 | 173 | 208 | 300 | 1,000 |
| FZP-200/206 | 8 | SiN | 2 | 200 | 206 | 255 | 1,600 |
| FZP-C234/2500 | 0.6 | SiC | 0.2 | 234 | 2,500 | 2,670 | 150 |
* Please note that the specifications may be subject to change without notice.
Rn : Outermost Zone Width
D : Diameter
N : Total Zone
Tm : Ta Thickness
Standard lead time: 12 weeks
Pattern image (φ2.5mm)
(Optical microscope)
Observed SEM image with diagonal angle
(SEM)
Fresnel Zone Plate (FZP) Structure
Binary type |
Step (kinoform) type |
| Minimum zone width (outer most zone) | 25nm |
| Maximum diameter | 5mm |
| Membrane material | SiN, SiC |
| Membrane thickness | 0.2-2µm |
| Absorber material | Ta |
| Absorber thickness | 0.1-2µm |
| Si substrate shape | 10mm square |
| Si substrate thickness | 1mm |
*We will be pleased to discuss different requirements with you.
