XUV filters

XUV filters


NTT-AT’s extreme ultraviolet (XUV or EUV) filters realize high-transmittance, high-stability, and long-lifetime for various EUV experiments. This premium quality filters are pinholeless, without support mesh and support film, and having oxidation protective coatings.

Premium free-standing EUV filters provided by NTT-AT is realized high transmittance and long lifetime by coating oxidation protective layers on both sides of the metal thin film.


Filter size: 10 mm * 10mm

Filter thickness: 100 nm

Holder size: diameter 28 mm

List of filters:

• Zr (for wavelength 10 – 20 nm)

• Al (for wavelength 20 – 50 nm)

• Sn/SiN (for wavelength 3 – 5 nm)

• In/SiN (for wavelength 3 – 5 nm)

The size, thickness, etc., will be customized upon request.

Example(Filter thickness: 100 nm)

In our demonstration, NTT-AT’s oxide protected Al XUV filter has 2 to 5 times higher transmittance than that of conventional Al filter, at 3 months after fabrication. This XUV filters will be stably used for a long time owing to the effect of the oxidation protective coatings.

All Information given here is reliable to our best knowledge. No responsibility is assumed for possible inaccuracies or omissions. Specifications and external appearances are subject to change without notice.